Document Type
Article
Publication Date
3-15-2004
Published In
Applied Physics Letters
Abstract
We compare the optical properties,chemical composition, and crystallinity of siliconmicrostructures formed in the presence of SF6 by femtosecond laserirradiation and by nanosecond laser irradiation. In spite of very different morphology and crystallinity, the optical properties and chemical composition of the two types of microstructures are very similar. The structures formed with femtosecond (fs) pulses are covered with a disordered nanocrystalline surface layer less than 1 μm thick, while those formed with nanosecond (ns) pulses have very little disorder. Both ns-laser-formed and fs-laser-formed structures absorb near-infrared (1.1–2.5 μm) radiation strongly and have roughly 0.5% sulfur impurities.
Recommended Citation
Catherine Hirshfeld Crouch et al.
(2004).
"Comparison Of Structure And Properties Of Femtosecond And Nanosecond Laser-Structured Silicon".
Applied Physics Letters.
Volume 84,
Issue 11.
1850-1852.
DOI: 10.1063/1.1667004
https://works.swarthmore.edu/fac-physics/204
Comments
This article is freely available courtesy of the American Institute of Physics.